microelectromechanically

The story

1. Proto-Indo-European*mey-der.?
2. Ancient Greekμῑκρός (mīkrós)
3. Ancient Greekμῑκρο- (mīkro-)
4. Englishmicro-
5. Frenchélectro-
6. Ancient Greekἤλεκτρον (ḗlektron)
7. Latinēlectrum
8. Latinelectro-
9. Englishelectro-
10. Proto-Indo-European*megʰ-der.?
11. Ancient Greekμηχανή (mēkhanḗ)
12. Ancient Greekμηχανικός (mēkhanikós)
13. Latinmēchanicus
14. Old Frenchmecanique
15. Middle Englishmechanic
16. Proto-Indo-European*h₂el-
17. Proto-Indo-European*h₂élisder.?
18. Middle Englishmechanical
19. Englishmechanical
20. Englishelectromechanical
21. Englishmicroelectromechanical
22. Proto-Indo-European*leyg-
23. Proto-Germanic*līką
24. English todaymicroelectromechanically

From microelectromechanical + -ly.