nanomechanically

The story

1. Ancient Greekνᾶνος (nânos)
2. Latinnānus
3. Englishnano-
4. Proto-Indo-European*megʰ-der.?
5. Ancient Greekμηχανή (mēkhanḗ)
6. Ancient Greekμηχανικός (mēkhanikós)
7. Latinmēchanicus
8. Old Frenchmecanique
9. Middle Englishmechanic
10. Proto-Indo-European*h₂el-
11. Proto-Indo-European*h₂élisder.?
12. Middle Englishmechanical
13. Englishmechanical
14. Proto-Indo-European*leyg-
15. Proto-Germanic*līką
16. English todaynanomechanically

From nano- + mechanically or from nanomechanical + -ly.