salicide

plural salicides

1. chemistryA compound of salicin e.g. salicide of potassium, hydrogen salicide

plural salicides

1. silicon microelectronicsAn electrical contact made from a silicide whose formation does not require lithographic patterning processes, i.e. it is "self-aligned"

   Platinum salicide process for BiCMOS applications

   1993, Khalid Sheergar, Platinum salicide process for BiCMOS applications, thesis, Carleton University

   4 more examples

   Composite: Self-aligned silicide/poly Si gate (salicide) (label on Figure 7d)

   1983 November 11, T. Paul Chow, Andrew J. Steckl, “Refractory Metal Silicides: Thin-Film Properties and Processing Technology”, in IEEE Trans. on Electron Devices, volume ED-30, number 11, November 1983, pages 1480–1497

   Titanium SALICIDE Process for VLSI Device Application

   1995, Wlodek Kaplan, Titanium SALICIDE Process for VLSI Device Application, Royal Institute of Technology

   A Novel Low Leakage-Current Ni SALICIDE Process in nMOSFETs on Si(110) Substrate

   2007, T. Yamaguchi et al., A Novel Low Leakage-Current Ni SALICIDE Process in nMOSFETs on Si(110) Substrate, 2007 IEEE International Electron Devices Meeting

   Advances on NiPt SALICIDE process optimization for 28nm CMOS manufacturing

   2010, Yi-Wei Chen et al., Advances on NiPt SALICIDE process optimization for 28nm CMOS manufacturing, 2010 International Symposium on Semiconductor Manufacturing (ISSM)