subfab

S1U1B3F4A1B3

noun

The area underneath a semiconductor fabrication plant

Scrabble 13
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Meanings

nounsubfab (plural subfabs)

plural subfabs

  1. The area underneath a semiconductor fabrication plant

    Line A involved a 121,000 ft 2 area, with downdraft laminar flow and flow-through ventilation from fab to subfab areas; the facility uses an open bay and chase design, such that SEGs may overlap within process bays or maintenance chases.

    2015 September 6, Rachael M. Jones et al., “Exposure Reconstruction and Risk Analysis for Six Semiconductor Workers With Lymphohematopoietic Cancers”, in Journal of Occupational and Environmental Medicine, volume 57, →DOI

Origin

From sub- + fab.

Full word history & related roots →
Cite this entry
APA

subfab. (n.d.). In WatkinsX Dictionary. Retrieved November 3, 2026, from https://dictionary.watkinsx.com/word/subfab

MLA

“subfab.” WatkinsX Dictionary, https://dictionary.watkinsx.com/word/subfab. Accessed November 3, 2026.

Chicago

WatkinsX Dictionary, s.v. “subfab,” accessed November 3, 2026, https://dictionary.watkinsx.com/word/subfab.

Source: subfab on Wiktionary, CC BY-SA 4.0.