Meanings
nounepitaxial layer (plural epitaxial layers)
plural epitaxial layers
- In semiconductor fabrication: a single crystal layer formed on top of a single crystal substrate.
It should be noted that a high temperature anneal in Ar, H₂, or high vacuum is a well established pre-epitaxial growth step by which a native oxide film is removed to obtain a good quality epitaxial layer[…].
1994, D. M. Lee, D. Ruprecht, D. Hymes, W. Huber, “Surface Characterization of Heat Treated Silicon Wafers”, in H[oward] R. Huff, W. Bergholz, K[ōji] Sumino, editors, Semiconductor Silicon/1994: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology (Electronics Division Proceedings; 94-10), The Electrochemical Society, →ISBN, page 241
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APA
epitaxial layer. (n.d.). In WatkinsX Dictionary. Retrieved November 4, 2026, from https://dictionary.watkinsx.com/word/epitaxial%20layer
MLA
“epitaxial layer.” WatkinsX Dictionary, https://dictionary.watkinsx.com/word/epitaxial%20layer. Accessed November 4, 2026.
Chicago
WatkinsX Dictionary, s.v. “epitaxial layer,” accessed November 4, 2026, https://dictionary.watkinsx.com/word/epitaxial%20layer.
Source: epitaxial layer on Wiktionary, CC BY-SA 4.0.